TUESDAY June 03, 4:00pm - 5:30pm | Room 300
TOPIC AREA: EDA
KEYWORD: DESIGN FOR MANUFACTURABILITY
EVENT TYPE: RESEARCH PAPER SESSION

SESSION 13
Twist it, Break it or Build it? The Frontier of Design Technology Interface
Chair:
Brian Cline - Arm, Ltd., Austin, TX
The answer to this question is up for debate because rather than a convergence in processes, the industry is experiencing a divergence in process technologies based on availability, maturity and economics. This session blasts the doors open to a wave of new ideas spanning contemporary approaches (inverse lithography, multiple patterning, EUV and DSA) as well as serving as inspiration in developing novel design technologies needed to manufacture new generations of electronic devices.

13.1Overlay-Aware Detailed Routing for Self-Aligned Double Patterning Lithography Using the Cut Process
 Speaker: Iou-Jen Liu - National Taiwan Univ., Taipei, Taiwan
 Authors: Iou-Jen Liu - National Taiwan Univ., Taipei, Taiwan
Shao-Yun Fang - National Taiwan Univ. of Science and Technology, Taipei, Taiwan
Yao-Wen Chang - National Taiwan Univ., Taipei, Taiwan
13.2Throughput Optimization for SADP and E-beam Based Manufacturing of 1D Layout
 Speaker: Yixiao Ding - Iowa State Univ., Ames, Iowa
 Authors: Yixiao Ding - Iowa State Univ., Ames, Iowa
Chris Chu - Iowa State Univ., Ames, IA
Wai-Kei Mak - National Tsing Hua Univ., Hsinchu, Taiwan
13.3*MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction
 Speaker: Jhih-Rong Gao - Univ. of Texas at Austin, TX
 Authors: Jhih-Rong Gao - Univ. of Texas at Austin, TX
Xiaoqing Xu - Univ. of Texas at Austin, TX
Bei Yu - Univ. of Texas at Austin, TX
David Z. Pan - Univ. of Texas at Austin, TX
13.4Layout Decomposition for Quadruple Patterning Lithography and Beyond
 Speaker: Bei Yu - Univ. of Texas at Austin, TX
 Authors: Bei Yu - Univ. of Texas at Austin, TX
David Z. Pan - Univ. of Texas at Austin, TX
13.5Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification
 Speaker: Chi-Yuan Liu - National Taiwan Univ., Taipei, Taiwan
 Authors: Chi-Yuan Liu - National Taiwan Univ., Taipei, Taiwan
Hui-Ju Chiang - National Taiwan Univ., Taipei, Taiwan
Yao-Wen Chang - National Taiwan Univ., Taipei, Taiwan
Jie-Hong R. Jiang - National Taiwan Univ., Taipei, Taiwan
13.6Directed Self-Assembly (DSA) Template Pattern Verification
 Speaker: Zigang Xiao - Univ. of Illinois at Urbana-Champaign, Urbana, IL
 Authors: Zigang Xiao - Univ. of Illinois at Urbana-Champaign, Urbana, IL
Yuelin Du - Univ. of Illinois at Urbana-Champaign, Urbana, IL
Haitong Tian - Univ. of Illinois at Urbana-Champaign, Urbana, IL
Martin D. F. Wong - Univ. of Illinois at Urbana-Champaign, Urbana, IL
He Yi - Stanford Univ., Stanford, CA
H.-S. Philip Wong - Stanford Univ., Stanford, CA
Hongbo Zhang - Synopsys, Inc., Hillsboro, OR


* Indicates Best Paper Candidate